Searched for: subject%3A%22MEMS%255C%2BGyroscope%22
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Ngana, P.J. (author)
In this thesis , a simulation model of a MEMS gyroscope is presented. The model enables mode matching and analysis of the dynamic behavior of a gyroscope. Furthermore, the model allows the optimization the design parameters of the gyroscope. The simulated gyroscope operates at a frequency of 52MHz with amplitudes of 10nm and quality factor of 50...
master thesis 2009