Designing a 100 [aF/nm] capacitive transducer

The mechanical part of inertial sensors can be designed to have a large mechanical sensitivity, but also requires the transduction mechanism which translates this displacement. The overall system resolution in mechanical inertial sensors is dictated by the noise contribution of each stage and the magnitude of each sensitivity, see also Figure...

Silicon photonic micro-ring resonators to sense strain and ultrasound

We demonstrated that photonic micro-ring resonators can be used in micro-machined ultrasound microphones. This might cause a breakthrough in array transducers for ultrasonography; first because optical multiplexing allows array interrogation via one optical fiber and second because the silicon-on-insulator technology allows cost-effective...

Characterization of Integrated Optical Strain Sensors Based on Silicon Waveguides

Microscale strain gauges are widely used in micro electro-mechanical systems (MEMS) to measure strains such as those induced by force, acceleration, pressure or sound. We propose all-optical strain sensors based on micro-ring resonators to be integrated with MEMS. We characterized the strain-induced shift of the resonances of such devices....

Design, Modeling and Simulation of a 52MHz MEMS Gyroscope Device in 1.5um SOI

In this thesis , a simulation model of a MEMS gyroscope is presented. The model enables mode matching and analysis of the dynamic behavior of a gyroscope. Furthermore, the model allows the optimization the design parameters of the gyroscope. The simulated gyroscope operates at a frequency of 52MHz with amplitudes of 10nm and quality factor of 50...