Searched for: subject%3A%22Mechatronic%255C+systems%22
(1 - 5 of 5)
document
Buskes, V. F. (author), Kaczmarek, M.B. (author), Veenstra, J. C. (author), Coulais, C. (author), Hassan HosseinNia, S. (author)
Metamaterials are artificial structures with properties that are rare or non-existent in nature. These properties are created by the geometry and interconnection of the metamaterial unit cells. In active metamaterials, sensors and actuators are embedded in each unit cell to achieve greater design freedom and tunability of properties after the...
conference paper 2023
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Tacx, Paul (author), Oomen, T.A.E. (author)
Next-generation motion stages are envisaged to be lightweight to meet stringent demands regarding accuracy and throughput. The lightweight stage design implies flexible dynamical behavior, which is foreseen to be severely excited due to increasing acceleration forces. The aim of this paper is to exploit additional actuators and sensors to...
journal article 2022
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Classens, Koen (author), Mostard, Mike (author), Van De Wijdeven, Jeroen (author), Maurice Heemels, W. P.M.H. (author), Oomen, T.A.E. (author)
The condition of mechatronic production equipment slowly deteriorates over time, increasing the risk of failure and associated unscheduled downtime. A key indicator for an increased risk for failures is the shifting of resonances. The aim of this paper is to track the shifting resonances of the equipment online and during normal operation....
journal article 2022
document
Huang, Y. (author), Pool, D.M. (author), Stroosma, O. (author), Chu, Q. P. (author)
Hydraulic driven manipulators face serious control problems due to the nonlinear system dynamics and model and parametric uncertainties of hydraulic actuators. In this paper, a novel sensor-based Incremental Nonlinear Dynamic Inversion controller is applied to force tracking control of hydraulic actuators of a hexapod flight simulator motion...
conference paper 2017
document
Saathof, R. (author)
In highly precise systems the thermal expansion of system-parts is of increasing concern, since it can severely compromise its performance at sub-nanometre level. An example of such a system is an Extreme UltraViolet (EUV)-lithography machine that is used in the semi-conductor industry to project the pattern of the chip onto a silicon wafer. In...
doctoral thesis 2013
Searched for: subject%3A%22Mechatronic%255C+systems%22
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