MEMS monocrystalline-silicon based thermal devices for chemical and microfluidic applications

This thesis explores the employment of monocrystalline silicon in microsystems as an active material for different thermal functions, such as heat generation and heat transfer by conduction. In chapter 1 applications that need thermal micro devices, micro heaters and micro heat exchangers, are briefly introduced. The shortcomings of commonly...

Silicon MEMS Micro-Evaporator