Buijtendorp, B.T. (author), Bueno, J. (author), Thoen, David (author), Sberna, V. Murugesan P.M. (author), Baselmans, J.J.A. (author), Vollebregt, S. (author), Endo, A. (author) Superconducting resonators used in millimeter-submillimeter astronomy would greatly benefit from deposited dielectrics with a small dielectric loss. We deposited hydrogenated amorphous silicon films using plasma-enhanced chemical vapor deposition, at substrate temperatures of 100°C, 250°C and 350°C. The measured void volume fraction, hydrogen...
conference paper 2020
