- document
-
van Kessel, L.C.P.M. (author), Huisman, T.A. (author), Hagen, Cornelis W. (author)Background: Line-edge roughness (LER) is often measured from top-down critical dimension scanning electron microscope (CD-SEM) images. The true three-dimensional roughness profile of the sidewall is typically ignored in such analyses. Aim: We study the response of a CD-SEM to sidewall roughness (SWR) by simulation. Approach: We generate...journal article 2020
- document
-
van Kessel, L.C.P.M. (author), Huisman, T. (author), Hagen, C.W. (author)Line-edge roughness (LER) is often measured from top-down critical dimension scanning electron microscope (CD-SEM) images. The true three-dimensional roughness profile of the sidewall is typically ignored in such analyses. We study the response of a CD-SEM to sidewall roughness (SWR) by simulation. We generate random rough lines and spaces,...conference paper 2020