A 6800-μ m² Resistor-Based Temperature Sensor with ±0.35 °c (3σ) Inaccuracy in 180-nm CMOS

This paper describes a compact resistor-based temperature sensor that has been realized in a 180-nm CMOS process. It occupies only 6800 μ m², thanks to the use of a highly digital voltage-controlled oscillator (VCO)-based phase-domain sigma-delta modulator, whose loop filter consists of a compact digital counter. Despite its small...

A Highly-Scalable Thermal-Diffusivity-Based Temperature Sensor

A highly digital temperature sensor, based on the thermal diffusivity of silicon, for thermal management applications has been reported. Recently, Thermal-Diffusivity based temperature sensors have undergone a radical change from an analog-based readout architecture to a more digital VCO-based one. However the more digital approach led to...

A Temperature-to-Digital Converter Based on an Optimized Electrothermal Filter

This paper describes the design of a CMOS temperature-to-digital converter (TDC). It operates by measuring the temperature-dependent phase shift of an electrothermal filter (ETF). Compared to previous work, this TDC employs an ETF whose layout has been optimized to minimize the thermal phase spread caused by lithographic inaccuracy. To minimize...