Development and prototype of a textured nanoimprinted air bearing system

Silicon wafers and solar cells are delicate components used in the semiconductor industries and energy industries. Handling and transportation can easily damage these components. Conventional handling methods with mechanical contact can cause various damages to these delicate surfaces. Air bearings can provide a solution by enabling an almost...

Elastohydrodynamic lubrication of soft-layered rollers and tensioned webs in roll-to-plate nanoimprinting

This work presents the development of a numerical model for the elastohydrodynamic lubrication of roll-to-plate nanoimprinting with flexible stamps. Roll-to-plate nanoimprinting is a manufacturing method to replicate micro- and nanotextures on large-area substrates with ultraviolet-curable resins. The roller is equipped with a relatively soft...

Simulating the Residual Layer Thickness in Roll-to-Plate Nanoimprinting with Tensioned Webs

Roll-to-plate nanoimprinting with flexible stamps is a fabrication method to pattern large-area substrates with micro- and nanotextures. The imprint consists of the preferred texture on top of a residual layer, of which the thickness and uniformity is critical for many applications. In this work, a numerical model is developed to predict the...

Large-scale overlay: a study into accuracies in roll-to-plate nanoimprint lithography

Roll-to-Plate (R2P) nanoimprint lithography (NIL) is a fabrication process with the potential for low-cost high-volume fabrication of micro- and nano-patterns on large areas. As a result, R2P is regarded as a promising production process for micro- and nano-scale features which exceed the conventional wafer sizes. In addition, the process has...