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Scheepstra, Jasper (author)In a world increasingly dominated by technological advancements, the demand for high-quality microphones has never been more present. Seamless speech recognition and the development of userfriendly hearing aids remain significant challenges. State-of-the-art micro-electromechanical system (MEMS) microphones are reaching their bottlenecks in...master thesis 2023
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Mo, J. (author), Middelburg, L.M. (author), Morana, B. (author), van Zeijl, H.W. (author), Vollebregt, S. (author), Zhang, Kouchi (author)The application of pressure sensors in harsh environments is typically hindered by the stability of the material over long periods of time. This work focuses on the design and fabrication of surface micromachined Pirani gauges which are designed to be compatible with state-of-the-art Silicon Carbide CMOS technology. Such an integrated...journal article 2021
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- Middelburg, L.M. (author) doctoral thesis 2020
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Middelburg, L.M. (author), van Zeijl, H.W. (author), Vollebregt, S. (author), Morana, B. (author), Zhang, Kouchi (author)This work focusses on the design and fabrication of surface micromachined pressure sensors, designed in a modular way for the integration with analog front-end read-out electronics. Polycrystalline 3C silicon carbide (SiC) was used to fabricate free-standing high topography cavities exploiting surface micromaching. The poly-SiC was in-situ...journal article 2020
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Quiros Solano, W.F. (author)Drug development is a complex, time-consuming (10 - 15 years) and expensive process. For a new medicine to reach the market, the net expenses covered by the pharmaceutical industry have been estimated to be around $2.6 billion. Nevertheless, the risk of finding adverse effects or toxicity cases once the drug is already on the market is still...doctoral thesis 2019
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Jagarlamudi, Samyuktha (author)Large scale industries like automobile, agriculture and poultry etc.. are in the need of a reliable technology for gas sensors. Till date various types of sensors have been developed for gas applications but the SiC gas sensing has been a recent trend. With increase study in MEMS technology, the SiC material is gaining importance for sensor...master thesis 2019
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Quiros Solano, W.F. (author), Gaio, N. (author), Silvestri, C. (author), Pandraud, G. (author), Dekker, R. (author), Sarro, Pasqualina M (author)Organ-on-chip (OOC) is becoming the alternative tool to conventional in vitro screening. Heart-on-chip devices including microstructures for mechanical and electrical stimulation have been demonstrated to be advantageous to study structural organization and maturation of heart cells. This paper presents the development of metal and polymeric...journal article 2019
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Sweers, Korné (author)Thermal oxidation in silicon microelectromechanical systems (MEMS) induces stress in the oxide film and silicon. Such residual stresses are usually unwanted, as it can influence performance or damage components. It can also cause unwanted plastic deformation in silicon, as was observed in previous research. Currentmeasurement methods inMEMSare...master thesis 2018
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Sinha, Sarat (author)Micro-hotplate and Micro-hotplate integrated Nano-reactors are a revolution for in-situ observations in Transmission Electron Microscopy (TEM) imaging. They currently operate at about 400oC without any problems. The SiNx membranes of micro-hotplate and Nano-reactors have integrated micro-heater along with electron transparent windows. The major...master thesis 2018
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Wu, K. (author), Tichem, M. (author)Photonic packaging, which includes high-precision assembly of photonic sub-systems, is currently a bottleneck in the development of commercially-available integrated photonic products. In the pursuit of a fully-automated, high-precision, and cost-effective photonic alignment scheme for two multi-channel photonic chips, this paper explores...journal article 2018
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Thomas, S. (author)Optical coherence tomography (OCT) probes rely on MEMS micro-scanners to provide fast and reproducible scans covering as much area as possible. A popular choice of actuators employed in this role are electrothermal bimorph actuators. They comprise of two layers of different materials which are rigidly joined together. Differential expansion...master thesis 2015
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- Morana, B. (author) doctoral thesis 2015
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Li, S.J. (author)Recently there has been an onset of fluidic filters fabricated using micro electro-mechanical systems (MEMS) technology. These filters, compared to conventional ones, are more accurate and precise due to the highly sophisticated techniques that are used to define and implement the separation mechanism. In order to contribute to this new field of...master thesis 2011
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Mihailovic, M. (author)This thesis explores the employment of monocrystalline silicon in microsystems as an active material for different thermal functions, such as heat generation and heat transfer by conduction. In chapter 1 applications that need thermal micro devices, micro heaters and micro heat exchangers, are briefly introduced. The shortcomings of commonly...doctoral thesis 2011
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- Hao, J. (author) master thesis 2009
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Rajaraman, V. (author), Pakula, L.S. (author), Pham, H.T.M. (author), Sarro, P.M. (author), French, P.J. (author)This paper presents a new low-cost, CMOS-compatible and robust wafer-level encapsulation technique developed using a stress-optimised PECVD SiC as the capping and sealing material, imparting harsh environment capability. This technique has been applied for the fabrication and encapsulation of a wide variety of surface- and thin-SOI...conference paper 2009
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Pakula, L.S. (author), Rajaraman, V. (author), French, P.J. (author)The operation principle, design, fabrication and measurement results of a quasi digital accelerometer fabricated on a thin silicon-on-insulator (SOI) substrate is presented. The accelerometer features quasi-digital output, therefore eliminating the need for analogue signal conditioning. The accelerometer can be directly interfaced to digital...conference paper 2009