Enhanced Filterbanks for THz On-Chip Spectrometers

Terahertz astronomy has been exceptionally unexplored until the last decades due to a technological gap, but exactly at these wavelengths the most distant galaxies appear very bright. Efficient instruments that are capable of spectrometry are essential in understanding the physics of these distant objects. Within the framework of this thesis, an...

Proximity effect in ion-beam-induced deposition of nanopillars

Ion-beam-induced deposition (IBID) is a powerful technique for prototyping three-dimensional nanostructures. To study its capability for this purpose, the authors investigate the proximity effect in IBID of nanopillars. In particular, the changes in shape and dimension of pillars are studied when a second pillar is grown near an existing pillar....

Formation of nanopores in a SiN/SiO2 membrane with an electron beam

An electron beam can drill nanopores in SiO2 or silicon nitride membranes and shrink a pore to a smaller diameter. Such nanopores are promising for single molecule detection. The pore formation in a 40?nm thick silicon nitride?SiO2 bilayer using an electron beam with a diameter of 8?nm (full width of half height) was investigated by electron...

Electron-beam-induced deformations of SiO2 nanostructures

The imaging beam of a transmission electron microscope can be used to fine tune critical dimensions in silicon oxide nanostructures. This technique is particularly useful for the fabrication of nanopores with single-nanometer precision, down to 2 nm. We report a detailed study on the effect of electron-beam irradiation on apertures with various...