A new single-photon avalanche diode in 90nm standard CMOS technology

A single-photon avalanche diode (SPAD) fabricated in a 90nm standard CMOS process is reported. The detector comprises an octagonal multiplication region and a guard ring to prevent premature edge breakdown using exclusively standard layers. The proposed structure is the result of a systematic study aimed at miniaturization, while optimizing...

Single-photon imaging in CMOS

We report on the architectural design and fabrication of medium and large arrays of single-photon avalanche diodes (SPADs) for a variety of applications in physics, medicine, and the life sciences. Due to dynamic nature of SPADs, designs featuring a large number of SPADs require careful analysis of the target application for an optimal use of...

High frame-rate TCSPC-FLIM using a novel SPAD-based image sensor

Imaging techniques based on time-correlated single photon counting (TCSPC), such as fluorescence lifetime imaging microscopy (FLIM), rely on fast single-photon detectors as well as timing electronics in the form of time-to-digital or time-to-analog converters. Conventional systems rely on stand-alone or small arrays (up to 32) of detectors and...

Video-rate fluorescence lifetime imaging camera with CMOS single-photon avalanche diode arrays and high-speed imaging algorithm

A high-speed and hardware-only algorithm using a center of mass method has been proposed for single-detector fluorescence lifetime sensing applications. This algorithm is now implemented on a field programmable gate array to provide fast lifetime estimates from a 32 × 32 low dark count 0.13 ?m complementary metaloxide-semiconductor single-photon...

A 1024 x 8, 700-ps Time-Gated SPAD Line Sensor for Planetary Surface Exploration With Laser Raman Spectroscopy and LIBS

A 1024 8 time-gated, single-photon avalanche diode line sensor is presented for time-resolved laser Raman spectroscopy and laser-induced breakdown spectroscopy. Two different chip geometries were implemented and characterized. A type-I sensor has a maximum photon detection efficiency of 0.3% and median dark count rate of 80 Hz at 3 V of excess...

Single-photon imaging in complementary metal oxide semiconductor processes

This paper describes the basics of single-photon counting in complementary metal oxide semiconductors, through single-photon avalanche diodes (SPADs), and the making of miniaturized pixels with photon-counting capability based on SPADs. Some applications, which may take advantage of SPAD image sensors, are outlined, such as fluorescence-based...

Characterization of Single-Photon Avalanche Diodes in Standard 140-nm SOI CMOS Technology

We report on the characterization of single-photon avalanche diodes (SPADs) fabricated in standard 140-nm silicon on insulator (SOI) complementary metal-oxide-semiconductor (CMOS) technology. As a methodology for SPAD optimization, a test structure array, called SPAD farm, was realized with several junctions, guard-ring structures, dimensions,...

Photon-Counting Arrays for Time-Resolved Imaging

The paper presents a camera comprising 512 × 128 pixels capable of single-photon detection and gating with a maximum frame rate of 156 kfps. The photon capture is performed through a gated single-photon avalanche diode that generates a digital pulse upon photon detection and through a digital one-bit counter. Gray levels are obtained through...

Flexible CMOS Single-Photon Avalanche Diode Image Sensor Technology

Cryo-CMOS Circuits and Systems for Quantum Computing Applications

A fault-tolerant quantum computer with millions of quantum bits (qubits) requires massive yet very precise control electronics for the manipulation and readout of individual qubits. CMOS operating at cryogenic temperatures down to 4 K (cryo-CMOS) allows for closer system integration, thus promising a scalable solution to enable future quantum...

High-Performance Back-Illuminated Three-Dimensional Stacked Single-Photon Avalanche Diode Implemented in 45-nm CMOS Technology

We present a high-performance back-illuminated three-dimensional stacked single-photon avalanche diode (SPAD), which is implemented in 45-nm CMOS technology for the first time. The SPAD is based on a P⁺/Deep N-well junction with a circular shape, for which N-well is intentionally excluded to achieve a wide depletion region, thus...

A CMOS SPAD Imager with Collision Detection and 128 Dynamically Reallocating TDCs for Single-Photon Counting and 3D Time-of-Flight Imaging

Per-pixel time-to-digital converter (TDC) architectures have been exploited by single-photon avalanche diode (SPAD) sensors to achieve high photon throughput, but at the expense of fill factor, pixel pitch and readout efficiency. In contrast, TDC sharing architecture usually features high fill factor at small pixel pitch and energy efficient...

CMOS SPAD Sensors for 3D Time-of-Flight Imaging, LiDAR and Ultra-High Speed Cameras

In conventional applications, such as bio-imaging and microscopy, SPAD is typically used as a single-photon counter. However, this advantage has been challenged by other photon-counting technologies, especially from CMOS-based QIS. Comparatively, apart from single-photon counting capability, QIS is superior to SPAD in terms of intrinsic multi...

Theoretical Minimum Uncertainty of Single-Molecule Localizations Using a Single-Photon Avalanche Diode Array

Optical microscopes are fundamentally limited to a resolution of several hundreds of nanometers by the diffraction of light. Single-molecule localization microscopy (SMLM) circumvents this limit by sparsely exciting fluorescent molecules at different time instances. Single molecules can subsequently be localized with improved precision over the...

SPAD-based Light Detection and Ranging for 3D imaging: Receiver operation and in-pixel TDC design for automotive application

In this work, a SPAD-based LiDAR system is studied. In particular, the system employs a direct time-of-flight (dToF) method to reconstruct a target-reflected pulses using histogram, from which the distance to the target is estimated. More particularly, a time correlated single photon counting (TCSPC) method has been used to record the flight...

LinoSPAD2: A 512×1 linear SPAD camera with system-level 135-ps SPTR and a reconfigurable computational engine for time-resolved single-photon imaging

The LinoSPAD2 camera combines a 512×1 linear single-photon avalanche diode (SPAD) array with an FPGA-based photon-counting and time-stamping platform, to create a reconfigurable sensing system capable of detecting single photons. The read-out is fully parallel, where each SPAD is connected to a different FPGA input. The hardware can be...

On-chip SPAD array with IO designed for quantum sensing

In this Bachelor graduation project, a 16x16 Single Photon Avalanche Diode (SPAD) array is designed in 40nm TSMC CMOS for diamond single Nitrogen Vacancy center array readout. It includes an active quenching and recharge circuit (AQC), a hold-off circuit for controllable dead-time and IO electronics for off-chip communication. The chip is part...