Wet ammonia Synthesis of Semiconducting N:Ta2O5, Ta3N5 and ?-TaON Films for Photoanode Applications

Tantalum oxynitride (?-TaON) is a promising photoanode material for photoelectrochemical water splitting. However, the synthesis of phase-pure ?-TaON films is a challenging task. This paper describes a novel approach to achieve this by the controlled nitridation of Ta2O5 films under a flow of ammonia gas (ammonolysis), which was obtained by...