Pereira, S.F. (author), Wiegman, A. (author), Kumar, N. (author), Da Costa Assafrao, A. (author), Polo, A. (author), Wei, L. (author), Van Haver, S. (author) Measurement techniques to determine the aberration of an optical system, by obtaining through-focus intensity images that are produced when the object is a point source at infinity, are shown. The analysis of the aberrations is made using the extended version of the Nijboer-Zernike diffraction theory. This theory provides a semi analytical...
conference paper 2012
