Searched for: subject%3A%22aerostatic%255C+thrust%255C+bearings%22
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Hoogeboom, R.P. (author)
Linear aerostatic bearings are frequently used in high precision stages for their advantageous bearing properties, with low friction and absence of stick-slip being most notable. To improve relatively low out-of-plane stiffness of air bearings, pre-loading is applied. A common method of pre-loading is by utilizing vacuum, where a constant vacuum...
master thesis 2016