An Electrowetting Valve with Air Channel

In recent years, microfluidic systems are used in various fields. In important component is the valve. In a variety of valve principles, the electrowetting valve promises high reliability, good controllability, low voltage operation and high transmission speed characteristics. The micro-fabrication method to create a chip-level electrowetting...

Squeeze-film damper design with air channels: Experimental verification

The experimental evaluation of damping-improved parallel-plate geometries is reported in this paper. An improved damper geometry with air channels was developed to address contradictory design constraints: large sensing parallel-plate area is desirable for a significant readout capacitance as well as reduced damping coefficient. Damping...