Searched for: subject%3A%22airgap%22
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Ghaderi, M. (author), Ayerden, N.P. (author), De Graaf, G. (author), Wolffenbuttel, R.F. (author)
The design and CMOS-compatible fabrication of airgap-based optical filters in a surface micromachining process with sacrificial release using thevapour phase is presented. An airgap-dielectric layer combination offers a higher refractive index contrast, as compared to the conventional all-dielectriclayer based filters, which results in a higher...
conference paper 2015
document
Ghaderi, M. (author), Ayerden, N.P. (author), De Graaf, G. (author), Wolffenbuttel, R.F. (author)
In CMOS-compatible optical filter designs, SiO2 is often used as the low-index material, limiting the optical contrast (nHi/nLo) to about 2. Using the air as low-index material improves the optical contrast by about 50%, thus increasing the reflectivity and bandwidth at a given design complexity. The design and fabrication of a 4-layered air...
journal article 2014