Searched for: subject:"aspheres"
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document
Marinescu, O. (author), Bociort, F. (author)
journal article 2008
document
Krieg, M.L. (author)
For the past thirty years, microchips have doubled in complexity every two years. This increasing complexity required that the size of the structures written on silicon halve at the same rate. A fundamentally limiting factor to the size of microchip structures is the wavelength of the lithographic projection processes used in their manufacture....
doctoral thesis 2004
document
Marinescu, O. (author), Bociort, F. (author), Braat, J. (author)
When Extreme Ultraviolet mirror systems having several high-order aspheric surfaces are optimized, the configurations often enter into highly unstable regions of the parameter space. Small changes of system parameters lead then to large changes in ray paths, and therefore optimization algorithms crash because certain sssumptions upon which they...
conference paper 2004
document
Vdovin, G. (author), De Lima Monteiro, D.W. (author), Akhzar-Mehr, O. (author), Loktev, M. (author), Sakarya, S. (author), Soloviev, O. (author), Sarro, P.M. (author)
We present an overview of the results of our recent research in the field of adaptive optical components based on silicon microtechnologies, including membrane deformable mirrors, spatial light modulators, liquid-crystal correctors, wavefront sensors, and both spherical and aspherical micro-optical components. We aim at the realization of...
conference paper 2004
Searched for: subject:"aspheres"
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