Searched for: subject%3A%22dark%255C+field%255C+microscopy%22
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van der Walle, P (author), Kramer, E. (author), van der Donck, J.C.J. (author), Mulckhuyse, W (author), Nijsten, L. (author), Bernal Arango, F.A. (author), de Jong, A. (author), van Zeijl, E. (author), Spruit, H. E.T. (author), van den Berg, J.H. (author), Nanda, G. (author), van Langen-Suurling, A.K. (author), Alkemade, P.F.A. (author), Pereira, S.F. (author), Maas, D.J. (author)
Particle defects are important contributors to yield loss in semi-conductor manufacturing. Particles need to be detected and characterized in order to determine and eliminate their root cause. We have conceived a process flow for advanced defect classification (ADC) that distinguishes three consecutive steps; detection, review and...
conference paper 2017
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Bouwens, MAJ (author), Maas, D (author), van der Donck, JCJ (author), Alkemade, P.F.A. (author), van der Walle, P (author)
To qualify tools of semiconductor manufacturing, particles unintentionally deposited in these tools are character-ized using blank wafers. With fast optical inspection tools one can quickly localize these particle defects. An ex-ample is TNO's Rapid Nano, which operates in optical darkfield. The next step is defect review for further...
journal article 2016
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Bouwens, M.A.J. (author)
In this thesis a stealth fiducial marker system for blank wafers is designed, fabricated and validated. The goal of this marker system it to map the coordinates of TNO’s Rapid Nano (a fast optical inspection tool) to the coordinates of scanning electron microscopes and atomic force microscopes. This way defects, that have been detected in the...
master thesis 2015
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Brinkers, S. (author)
doctoral thesis 2011
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Dietrich, H.R.C. (author), Vermolen, B.J. (author), Rieger, B. (author), Young, I.T. (author), Garini, Y. (author)
Single-molecule techniques continue to gain in popularity in research disciplines such as the study of intermolecular interactions. These techniques provide information that otherwise would be lost by using bulk measurements that deal with a large number of molecules. We describe in this report the motion of tethered DNA molecules that have been...
conference paper 2007
Searched for: subject%3A%22dark%255C+field%255C+microscopy%22
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