Using convolutional neural networks to automate aircraft maintenance visual inspection

Convolutional Neural Networks combined with autonomous drones are increasingly seen as enablers of partially automating the aircraft maintenance visual inspection process. Such an innovative concept can have a significant impact on aircraft operations. Though supporting aircraft maintenance engineers detect and classify a wide range of...

High-throughput parallel SPM for metrology, defect, and mask inspection

Scanning probe microscopy (SPM) is a promising candidate for accurate assessment of metrology and defects on wafers and masks, however it has traditionally been too slow for high-throughput applications, although recent developments have significantly pushed the speed of SPM [1,2]. In this paper we present new results obtained with our...

Parallel, Miniaturized Scanning Probe Microscope for Defect Inspection and Review

With the device dimensions moving towards the 1X node, the semiconductor industry is rapidly approaching the point where 10 nm defects become critical. Therefore, new methods for improving the yield are emerging, including inspection and review methods with sufficient resolution and throughput. Existing industrial tools cannot anymore fulfill...