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Meeder, M. (author), Mauret, T. (author), Booij, S. (author), Braat, J. (author), Faehnle, O. (author)
The possibilities of iTIRM, an in-process surface measurement tool, are explored in this research. Experiments are done to test the applicability for qualifying and optimising finishing processes for optical surfaces. Several optical glasses, different polishing agents and ductile grinding are included in these experiments. It is concluded that...
conference paper 2003