A Platform for Mechano(-Electrical) Characterization of Free-Standing Micron-Sized Structures and Interconnects

A device for studying the mechanical and electrical behavior of free-standing micro-fabricated metal structures, subjected to a very large deformation, is presented in this paper. The free-standing structures are intended to serve as interconnects in high-density, highly stretchable electronic circuits. For an easy, damage-free handling and...

High aspect-ratio MEMS devices for the next generation of THz/MHz passive components

The realization of efficient passive devices directly on chip represents one of the most intriguing challenges in IC fabrication processes. The performance of such devices are intrinsically determined by physical parameters that cannot be easily scaled, making the on-chip integration of such components a complex task to solve. To pursue the...

Electrical characterization of MEMS microphones

A reliable characterization of a MEMS microphone is essential for a better understanding of the device physics, for estimating the device performance and for guidance during the research, for better microphones. The work presented in this report focuses on the investigation and comparison of different measurement principles and techniques used...