Searched for: subject%3A%22flow%255C%252Bcompensated%22
(1 - 1 of 1)
document
de Graaf, G. (author), Abarca Prouza, A.N. (author), Wolffenbuttel, R.F. (author)
Conventional thermal conductivity detectors (TCDs) demonstrate a flow dependence. The approach presented here to reduce the flow dependence is based on the on-line flow compensation using two thin-film sensors on membranes in parallel on the same chip that are differentially operated. These are laterally identically, but with a different depth...
conference paper 2015