Air loading on ultrathin graphene membranes for microphone application

This thesis explores the challenges of using ultrathin graphene membranes in microelectronic mechanical sensors (MEMS) technology, specifically in the development of MEMS microphones. Graphene, being only an atom thin and one of the strongest known materials, offers promising potential for further miniaturization of MEMS microphones. However,...

Nonlinear dynamics of graphene membranes: Quality factor limits of membranes caused by mode interaction

Graphene is expected to open up a world of new possibilities in the field of micro and nano sensors, due to its outstanding properties. However, graphene membranes suffer from high damping which limit their performance. The physical mechanism behind this damping is still unknown. Therefore, in this work, it is investigated how coupling between...