Searched for: subject%3A%22height%255C+measurements%22
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Arat, K.T. (author), Bolten, Jens (author), Zonnevylle, A.C. (author), Kruit, P. (author), Hagen, C.W. (author)
Scanning electron microscopy (SEM) is one of the most common inspection methods in the semiconductor industry and in research labs. To extract the height of structures using SEM images, various techniques have been used, such as tilting a sample, or modifying the SEM tool with extra sources and/or detectors. However, none of these techniques...
journal article 2019
document
Moerland, R.J. (author), Hoogenboom, J.P. (author)
Available data: Complex refractive index of Indium Tin Oxide, http://dx.doi.org/10.4121/uuid:59febf27-a532-4ac9-8ec0-29d4195b2c8c Transparent conductive oxides (TCOs), such as the well-known indium-tin oxide, find widespread use in modern (nano)technological applications because of their unique combination of negligible optical absorption and...
journal article 2016
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Hermosa, N. (author), Rosales-Guzman, C. (author), Pereira, S.F. (author), Torres, J.P. (author)
We demonstrate an optical scheme for measuring the thickness of thin nanolayers with the use of light beam’s spatial modes. The novelty in our scheme is the projection of the beam reflected by the sample onto a properly tailored spatial mode. In the experiment described below, we are able to measure a step height smaller than 10 nm, i.e., one...
journal article 2014
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Somers, C.M.G. (author), Klein Breteler, M. (author)
report 1999
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