Single-grain Silicon Technology for Large Area X-ray Imaging

Digital flat panel X-ray imagers are currently using a-Si and poly-Si thin-film-transistors (TFTs). a-Si TFT permits the use of large area substrates, however, due to the amorphous nature, the carrier mobility is very low (<1 cm2/Vs). Poly-Si TFT improves the mobility (~150 cm2/Vs) but due to random grain boundaries, the defect density is still...

Design and fabrication of single grain TFTs and lateral photodiodes for low dose X-ray detection

Design, fabrication and measurement results of single grain (SG) lateral PIN photodiodes and SG thin film transistors (TFT) are reported in this paper. Devices were developed to be used in indirect X-ray image sensor pixel design. We have controlled position of 6 ?m x 6 ?m silicon grains with excimer-laser crystallization of a-Si film. Lateral...