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Klijnjan, Tim (author)Extreme Ultraviolet lithography is a vital step in the production of cutting edge computer chips that drive emergent technologies like AI, VR and the internet of things [1]. Careful control of Ultraviolet light beams by EUV machine modules such as the Unicom, Uniformity correction module, enable extremely precise printing of nano-scale...master thesis 2024
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Mohan, Adithya Keshav (author)Ceramics are being explored as an alternative material by ASML to replace their stainless steel 316L (SS316L) reticle masking blades. Ceramics offer distinct advantages over stainless steel in the semiconductor industry. While stainless steel exhibits good mechanical strength, ceramics excel in electrical insulation and thermal conductivity,...master thesis 2023
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RAMACHANDRAN, NAAGARAJAN (author)Pressurized liquid Tin finds application in the generation of Extreme Ultra-Violet light for semiconductor lithography. In order to improve the throughput of the lithography systems, tin must be pressurized to higher levels, and in turn, new pressurization methods are needed.<br/><br/>A phase change tin pump is an innovative system that...master thesis 2023
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Neeft, Tobias (author)Silicon wafers and solar cells are delicate components used in the semiconductor industries and energy industries. Handling and transportation can easily damage these components. Conventional handling methods with mechanical contact can cause various damages to these delicate surfaces. Air bearings can provide a solution by enabling an almost...master thesis 2023
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Ivančević, Lovro (author)The lack of reliable human physiology models in vitro combined with an ever-increasing set of health and safety requirements imposed by pharmaceutical regulatory agencies across the world is causing a concerningly low number of new drugs to reach the market. Organ-on-Chip (OoC) technology aims to aid faster development of new drugs by providing...master thesis 2021
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Ajroemjan, Wahhe (author)The packaging of a microchip affects its size, performance and cost. With advanced packaging, more efficient and smaller microchips can be produced. For this, advanced packaging stepper systems are used, which are lithography machines with a highly optimized projection lens system, that use a powerful light source. The projection lens system for...master thesis 2021
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Jain, Akash (author)An ever-increasing demand for making microchips smaller and quicker pushes for the advancement of lithography machines. System dynamics plays an important role in determining the performance of a lithography machine. This thesis is aimed to increase the throughput of an electron beam lithography machine, mainly for sparse patterns, by improving...master thesis 2021
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Neelen, Rob (author)Roll-to-Plate (R2P) nanoimprint lithography (NIL) is a fabrication process with the potential for low-cost high-volume fabrication of micro- and nano-patterns on large areas. As a result, R2P is regarded as a promising production process for micro- and nano-scale features which exceed the conventional wafer sizes. In addition, the process has...master thesis 2021
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Leliveld, Robert (author)This thesis describes a study into pairwise particle interactions within a Hele-Shaw geometry, using stop-flow lithography. By exposing a photoreactive mixture to a strong UV-pulse, a hydrogel is formed. The shape of this hydrogel is controlled by masking part of the light beam. This process takes place while the Hele-Shaw channel is placed on...master thesis 2021
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Bhardwaj, Shikhar (author)Advancements in the semiconductor manufacturing processes, particularly photo-lithography, contribute to the sustainability goals of the modern society by enabling production of cheaper, more efficient computer chips. This thesis work focused on improvements to a technique called immersion lithography that uses a confined pool of liquid as the...master thesis 2020
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van der Velden, Gijs (author)Organ-on-chip (OoC) devices are increasingly used for biomedical research and to speed up the process of bringing a medicinal drug from the lab to the market. The technology also addresses ethical issues linked to animal testing as it offers a reduction in animal experiments through its possibility to mimic the environment in the human body....master thesis 2019
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Kapel, Pieter (author)A manufacturing technology is proposed to manufacture polymeric membrane scaffolds for culturing of cells, tissues, and organoids with integrated sensor capabilities and fluidic functionalities. A multilayer substrate is imprinted with a soft mold to manufacture polymeric membrane scaffolds for culturing of cells, tissues, and organoids with...master thesis 2018
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Overes, Bart (author)Micro-/nanoimprint lithography is a high-throughput, high-resolution, and low-cost mass production fabrication process often used for creating microfluidic devices and optical components. In the imprint lithography process, a surface pattern of a stamp is replicated into a material by mechanical contact and three dimensional material...master thesis 2018
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Harsha Achanta, S. (author): Light emitting diodes (LEDs) have made remarkable progress since their invention and today they can be found in a wide range of applications such as TV remotes, automotive headlamps, general lighting, traffic signals, camera flashes, display and screens. LEDs that emit light in the ultraviolet-C (UV-C) range are used in applications such as...master thesis 2016
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Hammann, C.P.W. (author)There is a need for joint replacing implants due to osteoarthritis and trauma. For non-cemented implants made of titanium alloys, bone ingrowth is needed. However bone ingrowth is not always accomplished. Implant micro/nanotopography can be used to enhance bone ingrowth through cellular interactions. Therefore, processes to generate controlled...master thesis 2016
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Kant, N. (author)In this thesis a model-based filter is developed to improve the estimates of the lens aberrations.master thesis 2015
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De Buck, P.B.A. (author)Lens set-up using PARIS (Parallel ILIAS) Lens set-up State of the art coarse lithographic lens set-up consists of ILIAS, FOCAL and DISTO tests. A proposal is done to phenomenologically represent gain and offset in each of the tests. A data-driven method to construct the model is introduced. This model can be related to a PARIS-based set-up test....master thesis 2014
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Asch, V. (author)The goal of this project is to model, fabricate and characterize a multi microchamber biochip, which allows for crosstalk between two types of living cells. This biochip uses laminar flow to separate two microchambers for cell co-culture. A study of fluid dynamics through finite element analysis was implemented to optimize two methods for...master thesis 2011
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Shen, J. (author)This thesis is about an innovative application of nanoimprinting lithography in organic ferroelectric memories, which can achieve multi-bit data storage. Multi-bit data storage, defined here as storage of multiple bits in a single device cell, can potentially make higher density ferroelectric memory at a lower price. The idea is based on...master thesis 2011