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document
Hoogeboom, R.P. (author)
Linear aerostatic bearings are frequently used in high precision stages for their advantageous bearing properties, with low friction and absence of stick-slip being most notable. To improve relatively low out-of-plane stiffness of air bearings, pre-loading is applied. A common method of pre-loading is by utilizing vacuum, where a constant vacuum...
master thesis 2016
document
Wang, Y.W. (author)
An Integrated 6-DoF Lorentz Actuator with Gravity Compensator for Vibration / Precision Positioning has been analyzed and optimized. The gravity compensation function is realized by permanent magnets. The 6-DoF actuator is based on the utilization of the mover magnets. A demonstrator of the novel 6-DoF actuator integrated with magnetic gravity...
master thesis 2015