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Query

  • (-) subject:"mask\ inspection"

Collection

  • Institutional Repository (3)

Document type

  • conference paper (2)
  • doctoral thesis (1)

Subject

  • defect inspection (2)
  • mask inspection (2)
  • EUV mask inspection and metrology (1)
  • Scanning Probe Microscopy (1)
  • defect review (1)
  • high-throughput metrology (1)
  • inverse problems (1)
  • miniaturized SPM (1)
  • parallel SPM (1)
  • patterned wafer inspection (1)
  • phase retrieval (1)
  • scatterometry (1)
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Author

  • Crowcombe (2)
  • Herfst (2)
  • Kramer (2)
  • Sadeghian Marnani (2)
  • Van den Dool (2)
  • Winters (2)
  • Ansuinelli (1)
  • Koster (1)

Date

2014 - 2023
(years)
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Format: 2023/06/08
Searched for: subject%3A%22mask%255C%2Binspection%22
(1 - 3 of 3)
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Inverse Electromagnetics for EUV mask metrology and inspection
Inverse Electromagnetics for EUV mask metrology and inspection
High-throughput parallel SPM for metrology, defect, and mask inspection
High-throughput parallel SPM for metrology, defect, and mask inspection
Parallel, Miniaturized Scanning Probe Microscope for Defect Inspection and Review
Parallel, Miniaturized Scanning Probe Microscope for Defect Inspection and Review
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