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Li, J. (author)Around 10% of the population will have to go through a catheterization procedure for the treatment of a cardiovascular disease at a certain stage of their lives. During such a procedure, smart catheters will be the "eyes and ears" of the surgeons, significantly improving the diagnosis and treatment. However, there have been very limited...doctoral thesis 2024
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Kawasaki, S. (author)CMUTs (Capacitive Micromachined Ultrasonic Transducers) are causing a technological revolution. Research over the last decade showed that CMUTs can sufficiently replace traditional ultrasound technology based on the bulk PZT, along with other benefits such as lower assembly cost, broader bandwidth and monolithic integration capability with ASICs...doctoral thesis 2024
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Pezone, R. (author), Baglioni, G. (author), Sarro, Pasqualina M (author), Steeneken, P.G. (author), Vollebregt, S. (author)A repeatable method to fabricate multi-layer graphene (ML-gr) membranes of 2r = 85 - 155 μm (t < 10 nm) with a 100% yield on 100 mm wafers is demonstrated. These membranes show higher sensitivity than a commercial MEMS-Mic combined with an area reduction of 10x. The process overcomes one of the main limitations when integrating graphene...conference paper 2023
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French, P.J. (author), Krijnen, Gijs JM (author), Vollebregt, S. (author), Mastrangeli, Massimo (author)Silicon sensors date back to before 1960 with early Hall and piezoresistive devices. These used simple processing that was part of the early integrated circuit (IC) industry. As the IC industry developed, silicon sensors could benefit from the technological advances. As silicon sensors advanced, there came the need for new technologies...journal article 2022
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How Cheah, Kean (author), Ganani, Chaggai (author), Lemmer, Kristina (author), Cervone, A. (author)This chapter covers the development of cold gas microthruster, which is widely regarded as the simplest way of generating thrust in space, for nanosatellites. A brief background and principles of operation were given, followed by the introduction of nozzle theory that could be used in the preliminary estimation of microthruster performance...book chapter 2022
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Pezone, R. (author), Baglioni, G. (author), Sarro, Pasqualina M (author), Steeneken, P.G. (author), Vollebregt, S. (author)During the past decades micro-electromechanical microphones have largely taken over the market for portable devices, being produced in volumes of billions yearly. Because performance of current devices is near the physical limits, further miniaturization and improvement of microphones for mobile devices poses a major challenge that requires...journal article 2022
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Kluba, M.M. (author), Li, J. (author), Parkkinen, Katja (author), Louwerse, Marcus (author), Snijder, Jaap (author), Dekker, R. (author)Several Silicon on Insulator (SOI) wafer manufacturers are now offering products with customer‐defined cavities etched in the handle wafer, which significantly simplifies the fabrication of MEMS devices such as pressure sensors. This paper presents a novel cavity buried oxide (BOX) SOI substrate (cavity‐BOX) that contains a patterned BOX...journal article 2021
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Tang, Adrian (author), Alonso Del Pino, M. (author), Kim, Yanghyo (author), Zhang, Yan (author), Reck, Theodore (author), Jung-Kubiak, Cecile (author), Nemchick, Deacon (author), Dyer, Logan (author), Virbila, Gabriel (author), Chattopadhyay, Goutam (author), Chang, Mau Chung Frank (author)This paper presents an overview of a sub-orbital flight demonstration with a 183 GHz and 540–600 GHz limb-sounding instrument aboard a stratospheric ballooncraft. The 183 GHz band provides soundings of stratospheric H 2 O and is implemented with a hybrid CMOS-InP receiver architecture which provides excellent sensitivity while remaining compact ...journal article 2021
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Martins Da Ponte, R. (author), Gaio, N. (author), van Zeijl, H.W. (author), Vollebregt, S. (author), Dijkstra, Paul (author), Dekker, R. (author), Serdijn, W.A. (author), Giagka, Vasiliki (author)One of the many applications of organ-on-a-chip (OOC) technology is the study of biological processes in human induced pluripotent stem cells (iPSCs) during pharmacological drug screening. It is of paramount importance to construct OOCs equipped with highly compact in situ sensors that can accurately monitor, in real time, the extracellular...journal article 2021
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Verbiest, G.J. (author), Goldsche, M. (author), Sonntag, J. (author), Khodkov, T. (author), von den Driesch, N. (author), Buca, D. (author), Stampfer, C. (author)Coupled nanomechanical resonators are interesting for both fundamental studies and practical applications as they offer rich and tunable oscillation dynamics. At present, the mechanical coupling in such systems is often mediated by a fixed geometry, such as a joint clamping point of the resonators or a displacement-dependent force. Here we...journal article 2021
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Harjanto, Eric (author), van Horssen, W.T. (author), Tuwankotta, Johan M. (author)In this paper, the oscillations of an actuated, simply supported microbeam are studied for which it is assumed that the electric load is composed of a small DC polarization voltage and a small, harmonic AC voltage. Bending stiffness and mid-plane stretching are taken into account as well as small viscous or structural damping. No tensile...journal article 2021
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Mo, J. (author), Middelburg, L.M. (author), Morana, B. (author), van Zeijl, H.W. (author), Vollebregt, S. (author), Zhang, Kouchi (author)The application of pressure sensors in harsh environments is typically hindered by the stability of the material over long periods of time. This work focuses on the design and fabrication of surface micromachined Pirani gauges which are designed to be compatible with state-of-the-art Silicon Carbide CMOS technology. Such an integrated...journal article 2021
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- Middelburg, L.M. (author) doctoral thesis 2020
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Ouyang, B. (author)Ultrasound sensors based on integrated photonics devices provide a new solution to meet the miniaturization demand for the detection functionality of transducers. An important example is the silicon ring-resonator (RR) ultrasound sensor developed in our department. This sensor combines a small footprint with high sensitivity and a low detection...doctoral thesis 2020
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Sun, J. (author)The microelectronics industry, next to the powerful, continuously scaling of integrated circuits, is currently evolving in the diversification of integrated functions, generally referred to as more than Moore (MtM). MtM concerns all technologies enabling microsystems to be elevated to a higher integration level, and with small package size,...doctoral thesis 2020
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Ouyang, B. (author), Li, Yanlu (author), Kruidhof, Marten (author), Horsten, R.C. (author), Baets, Roel (author), van Dongen, K.W.A. (author), Caro-Schuurman, J. (author)We report a highly sensitive ultrasound sensor based on an integrated photonics silicon Mach-Zehnder interferometer (MZI). One arm of the MZI is located on a thin membrane, acting as the sensing part of the device. Ultrasound waves excite the membrane's vibrational mode, thus inducing modulation of the MZI transmission. The measured sensor...conference paper 2020
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Li, Ming Huang (author), Lu, Ruochen (author), Manzaneque Garcia, T. (author), Gong, Songbin (author)In this work, thin-film lithium niobate (LiNbO<sub>3</sub>) acoustic delay line (ADL) based oscillators are experimentally investigated for the first time for the application of single-mode oscillators and frequency comb generation. The design space for the ADL-based oscillator is first analyzed, illustrating that the key to low phase noise...conference paper 2020
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Middelburg, L.M. (author), van Zeijl, H.W. (author), Vollebregt, S. (author), Morana, B. (author), Zhang, Kouchi (author)This work focusses on the design and fabrication of surface micromachined pressure sensors, designed in a modular way for the integration with analog front-end read-out electronics. Polycrystalline 3C silicon carbide (SiC) was used to fabricate free-standing high topography cavities exploiting surface micromaching. The poly-SiC was in-situ...journal article 2020
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Sun, J. (author), Hu, D. (author), Liu, Zewen (author), Middelburg, L.M. (author), Vollebregt, S. (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)A micro-scale pressure sensor based on suspended AlGaN/GaN heterostructure is reported with non-linear sensitivity. By sealing the cavity, vacuum sensing at various temperatures was demonstrated. To validate the proposed concept of the AlGaN/GaN vacuum sensor, a 700 µm diameter circular membrane was electrically characterized under applied...journal article 2020
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Gkouzou, A. (author), Janssen, G.C.A.M. (author), van Spengen, W.M. (author)In this paper, we report on the in situ synthesis of graphene layers by means of chemical vapor deposition (CVD), directly on nickel micro-electromechanical systems (MEMS) surfaces. We have developed MEMS structures of which the temperature can be increased locally by Joule heating while in a methane environment. For our MEMS structures, the...journal article 2020