Validation of separated source frequency delivery for a fiber-coupled heterodyne displacement interferometer

The use of optical fibers presents several advantages with respect to free-space optical transport regarding sourcefrequency delivery to individual heterodyne interferometers. Unfortunately, fiber delivery to individual coaxial heterodyne interferometers leads to an increase of (periodic) nonlinearity in the measurement, because transporting...

Heterodyne displacement interferometer, insensitive for input polarization

Periodic nonlinearity (PNL) in displacement interferometers is a systematic error source that limits measurement accuracy. The PNL of coaxial heterodyne interferometers is highly influenced by the polarization state and orientation of the source frequencies. In this Letter, we investigate this error source and discuss two interferometer designs,...

Fiber-coupled displacement interferometry without periodic nonlinearity

Displacement interferometry is widely used for accurately characterizing nanometer and subnanometer displacements in many applications. In many modern systems, fiber delivery is desired to limit optical alignment and remove heat sources from the system, but fiber delivery can exacerbate common interferometric measurement problems, such as...