Recent Advances in Magnetic Polymer Composites for BioMEMS: A Review

The objective of this review is to investigate the potential of functionalized magnetic polymer composites for use in electromagnetic micro-electro-mechanical systems (MEMS) for biomedical applications. The properties that make magnetic polymer composites particularly interesting for application in the biomedical field are their biocompatibility...

Design of a valveless organ-on-chip micropump: A new take on on-chip actuation for organ-on-chip devices

In the last few years organ-on-chip (OoC) has been emerging as a new method for more reliable research to screen the effects of new drugs on the body. This is a novel technology mimicking the in vivo environment of tissue cells, making it a more suitable candidate for experimentation than traditional 2D cell cultures. However, in order to ensure...

Proportional Microvalve Using a Unimorph Piezoelectric Microactuator

Microvalves are important flow-control devices in many standalone and integrated microfluidic applications. Polydimethylsiloxane (PDMS)-based pneumatic microvalves are commonly used but they generally require large peripheral connections that decrease portability. There are many alternatives found in the literature that use Si-based microvalves,...

On-chip positionable waveguides for submicrometric photonic alignment

In this paper, we present positionable photonic waveguide arrays that are developed for optical chip-to-chip alignment. Partly suspended photonic structures, based on the Si3N4/SiO2 material platform, are equipped with thermal actuators enabling the free end of the structures to be positioned with submicrometer accuracy. A finite-element model...

Development of Nanotools for Applications in (sub-)Femtofluidics and Graphene Technologies

Properties of matter at the nano-scale may be very different from the ones observed at the macro-scale. The continuous variation of characteristics with diminishing size results in relevant changes in behavior. Similarly, these changes are caused by the rise of completely new phenomena (i.e. quantum confinement). Nanoscience can offer an...

Product-internal assembly functions: A novel micro-assembly concept applied to optical interconnects

In this project, the technical feasibility of a novel assembly concept was explored, in which microsystem-based self-assembly functionality is added to an existing product. The case considered is the accurate alignment of an optical fibre relative to a telecommunication laser source. In the most demanding cases this requires alignment accuracies...

Polymeric Thermal Microactuator With Embedded Silicon Skeleton: Part II—Fabrication, Characterization, and Application for 2-DOF Microgripper

Two-Dimensional Fiber Positioning and Clamping Device for Product-Internal Microassembly

In this paper, we present a microelectromechanical systems-based two-degrees-of-freedom positioning device combined with a clamping structure for positioning and constraining an optical fiber. The fiber position can be controlled in the two directions perpendicular to the fiber axis using two specifically designed wedges that can be accurately...

Micro-electro-mechanical actuators using confined polymers

Polymers can be used to constitute "artificial muscles" that actuate under an electric stimulus. These polymers include dielectric elastomers and thermally expandable polymers. They are insulating and relatively compliant. Their electric activation is enabled with integration of electrodes, heat conductors or heaters. However, the electrodes or...

Polymer constraint effect for electrothermal bimorph microactuators

The authors report on the analysis of the polymer constraint effect and its use for a micromachined electrothermal bimorph actuator. The actuated displacement is enhanced due to the polymer constraint effect. Both the thermal expansion and apparent Young’s modulus of the constrained polymer blocks are significantly improved, compared with the no...

Powerful polymeric thermal microactuator with embedded silicon microstructure

A powerful and effective design of a polymeric thermal microactuator is presented. The design has SU-8 epoxy layers filled and bonded in a meandering silicon (Si) microstructure. The silicon microstructure reinforces the SU-8 layers by lateral restraint. It also improves the transverse thermal expansion coefficient and heat transfer for the...

Magnetovibrational coupling in small cantilevers

A nanomagnetomechanical system consisting of a cantilever and a thin magnetic film is predicted to display magnetovibrational modes, which should enable applications for sensors and actuators. The “polaritonic” modes can be detected by line splittings in ferromagnetic resonance spectra.

Design and fabrication of a surface micromachined positioning device.