Characterization of room temperature metal microbolometers near the metal-insulator transition regime for scanning thermal microscopy

Metal microbolometers, used in scanning thermal microscopy, were microfabricated from <20?nm titanium thin films on SiO2/Si3N4/SiO2 cantilevers. These thin films are near the metal-insulator transition regime such that as the film thickness decreases—the resistance increases and the current-voltage characteristics cross over from sublinear to...