Searched for: subject%3A%22microscopy%22
(1 - 9 of 9)
document
van der Walle, P (author), Kramer, E. (author), van der Donck, J.C.J. (author), Mulckhuyse, W (author), Nijsten, L. (author), Bernal Arango, F.A. (author), de Jong, A. (author), van Zeijl, E. (author), Spruit, H. E.T. (author), van den Berg, J.H. (author), Nanda, G. (author), van Langen-Suurling, A.K. (author), Alkemade, P.F.A. (author), Pereira, S.F. (author), Maas, D.J. (author)
Particle defects are important contributors to yield loss in semi-conductor manufacturing. Particles need to be detected and characterized in order to determine and eliminate their root cause. We have conceived a process flow for advanced defect classification (ADC) that distinguishes three consecutive steps; detection, review and...
conference paper 2017
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Bouwens, MAJ (author), Maas, D (author), van der Donck, JCJ (author), Alkemade, P.F.A. (author), van der Walle, P (author)
To qualify tools of semiconductor manufacturing, particles unintentionally deposited in these tools are character-ized using blank wafers. With fast optical inspection tools one can quickly localize these particle defects. An ex-ample is TNO's Rapid Nano, which operates in optical darkfield. The next step is defect review for further...
journal article 2016
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Nanda, G. (author), Van Veldhoven, E. (author), Maas, D. (author), Sadeghian, H. (author), Alkemade, P.F.A. (author)
The authors report the direct-write growth of hammerhead atomic force microscope(AFM) probes by He+beam induced deposition of platinum-carbon. In order to grow a thin nanoneedle on top of a conventional AFM probe, the authors move a focused He+beam during exposure to a PtC precursor gas. In the final growth stage, a perpendicular movement of the...
journal article 2015
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Maas, D. (author), Van veldhoven, E. (author), Chen, P. (author), Sidorkin, V. (author), Salemink, H. (author), Van der Drift, E. (author), Alkemade, P. (author)
The recently introduced helium ion microscope (HIM) is capable of imaging and fabrication of nanostructures thanks to its sub-nanometer sized ion probe [1,2]. The unique interaction of the helium ions with the sample material provides very localized secondary electron emission, thus providing a valuable signal for high-resolution imaging as well...
conference paper 2010
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Maas, D. (author), Van Veldhoven, E. (author), Chen, P. (author), Sidorkin, V. (author), Salemink, H. (author), Van der Drift, E. (author), Alkemade, P. (author)
The recently introduced helium ion microscope (HIM) is capable of imaging and fabrication of nanostructures thanks to its sub-nanometer sized ion probe [1,2]. The unique interaction of the helium ions with the sample material provides very localized secondary electron emission, thus providing a valuable signal for high-resolution imaging as well...
conference paper 2009
document
Docter, M.W. (author), Van den Berg, P.M. (author), Alkemade, P.F.A. (author), Kutchoukov, V.G. (author), Piciu, O.M. (author), Bossche, A. (author), Young, I.T. (author), Garini, Y. (author)
journal article 2007
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Docter, M.W. (author), Young, I.T. (author), Piciu, O. (author), Bossche, A. (author), Alkemade, P.F.A. (author), Van de Berg, P.M. (author), Garini, Y. (author)
The knowledge of the near-field of extra-ordinary transmission through hole-arrays is mostly theoretical; there is less experimental validation of the theory. We study the near-field properties by measuring fluorescent molecules that are immersed in a solution and their Brownian motion. The measurements are performed by filling the space above...
conference paper 2006
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Docter, M.W. (author), Young, I.T. (author), Kutchoukov, V.G. (author), Bossche, A. (author), Alkemade, P.F.A. (author), Garini, Y. (author)
When light passes through a hole smaller than the wavelength of the light, the transmission is very low and the light is diffracted. This however changes if holes are arranged in a periodic array on metal. In that case the light couples to surface plasmons; this results in enhanced transmission, spectral selection and a small angular diffraction...
conference paper 2005
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Garini, Y. (author), Kutchoukov, V.G. (author), Bossche, A. (author), Alkemade, P.F.A. (author), Docter, M.W. (author), Verbeek, P.W. (author), Van Vliet, L.J. (author), Young, I.T. (author)
Recently, an extraordinary transmission of light through small holes (<200 nm) in a thin metallic film has been described. This phenomenon has been shown to be the result of the photon-plasmon interaction in thin films where a periodic structure (such as a set of holes) is embedded in the film. One of the extraordinary results is that the beam...
conference paper 2004
Searched for: subject%3A%22microscopy%22
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