Karimi Shahmarvandi, Ehsan (author), Ghaderi, M. (author), Ayerden, N.P. (author), de Graaf, G. (author), Wolffenbuttel, R.F. (author) The design of a metamaterial-based absorber for use in a mid-IR microspectrometer-based gas sensor is reported.The microspectrometer consists of a linear variable optical filter (LVOF) that is aligned with an array of thermopiledetectors, which is fabricated on a SiN membrane and covered with the absorber. Special emphasis was put on theCMOS...
journal article 2016