Spectral measurement using IC-compatible linear variable optical filter

This paper reports on the functional and spectral characterization of a microspectrometer based on a CMOS detector array covered by an IC-Compatible Linear Variable Optical Filter (LVOF). The Fabry-Perot LVOF is composed of 15 dielectric layers with a tapered middle cavity layer, which has been fabricated in an IC-Compatible process using resist...

IC-compatible microspectrometer using a planar imaging diffraction grating.

The design and performance of a highly miniaturized spectrometer fabricated using MEMS technologies are reported in this paper. Operation is based on an imaging diffraction grating. Minimizing fabrication complexity and assembly of the micromachined optical and electronic parts of the microspectrometer implies a planar design. It consists of two...