Searched for: subject%3A%22nanofabrication%22
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Maduro, L.A. (author)
The family of transitionmetal dichalcogenides offer a unique platformfor electronic and optical tunability due to the sensitivity to their dimensional configuration, edge terminations, and varying crystal phases. In this thesis we focus on structures based on the transition metal dichalcogenides MoS2 and WS2. We study how different crystal...
doctoral thesis 2021
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Glessi, Cristiano (author), Mahgoub, A.M.I.M. (author), Hagen, C.W. (author), Tilset, Mats (author)
Seven gold(I) N-heterocyclic carbene (NHC) complexes were synthesized, characterized, and identified as suitable precursors for focused electron beam-induced deposition (FEBID). Several variations on the core Au(NHC)X moiety were introduced, that is, variations of the NHC ring (imidazole or triazole), of the alkyl N-substituents (Me, Et, or...
journal article 2021
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Van Delft, Falco C.M.J.M. (author), Sudalaiyadum Perumal, Ayyappasamy (author), van Langen-Suurling, A.K. (author), de Boer, C.R. (author), Kašpar, Ondřej (author), Tokárová, Viola (author), Dirne, F. (author), Nicolau, Dan V. (author)
Non-deterministic polynomial (NP-) complete problems, whose number of possible solutions grows exponentially with the number of variables, require by necessity massively parallel computation. Because sequential computers, such as solid state-based ones, can solve only small instances of these problems within a reasonable time frame, parallel...
journal article 2021
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Forsch, M. (author)
In cavity optomechanics, optical fields are coupled to the displacement of mechanical resonators. While it is interesting to study fundamental aspects of this interaction, it is the ability to link this mechanical displacement to various other degrees of freedom that inspires many applications in the field. In these applications, the mechanical...
doctoral thesis 2020
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Leeuwenhoek, M. (author)
doctoral thesis 2020
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Mahgoub, M.I.M.A. (author), Lu, Hang (author), Thorman, Rachel M. (author), Preradovic, Konstantin (author), Jurca, Titel (author), McElwee-White, Lisa (author), Fairbrother, Howard (author), Hagen, C.W. (author)
Two platinum precursors, Pt(CO)<sub>2</sub>Cl<sub>2</sub> and Pt(CO)<sub>2</sub>Br<sub>2</sub>, were designed for focused electron beam-induced deposition (FEBID) with the aim of producing platinum deposits of higher purity than those deposited from commercially available precursors. In this work, we present the first deposition experiments...
journal article 2020
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Jeevanandam, G. (author), van der Meijden, V. (author), Birnie, L. D. (author), Kruit, P. (author), Hagen, C.W. (author)
To allow researchers to fabricate micro- and nano-devices on a small scale, without having to use complex cleanroom facilities, a single tool is proposed in which a variety of typical cleanroom techniques and processes is combined. This ‘cleanroom’ in SEM tool, based on a scanning electron microscope (SEM), integrates several add-on tools,...
journal article 2020
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Leeuwenhoek, M. (author), Norte, R.A. (author), Bastiaans, Koen M. (author), Cho, Doohee (author), Battisti, Irene (author), Blanter, Y.M. (author), Groeblacher, S. (author), Allan, Milan P. (author)
We report on the fabrication and performance of a new kind of tip for scanning tunneling microscopy. By fully incorporating a metallic tip on a silicon chip using modern micromachining and nanofabrication techniques, we realize so-called smart tips and show the possibility of device-based STM tips. Contrary to conventional etched metal wire...
journal article 2019
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Ruf, M.T. (author), IJspeert, M. (author), van Dam, S.B. (author), de Jong, N. (author), van den Berg, J.H. (author), Evers, G.P.H. (author), Hanson, R. (author)
Diamond membrane devices containing optically coherent nitrogen-vacancy (NV) centers are key to enable novel cryogenic experiments such as optical ground-state cooling of hybrid spin-mechanical systems and efficient entanglement distribution in quantum networks. Here, we report on the fabrication of a (3.4 ± 0.2) μm thin, smooth (surface...
journal article 2019
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Ha, S. (author)
This thesis describes developments in the single-molecule instrumentation, in particular optical torque wrench and DNA nanocurtains, with the goal of employing these techniques in studies of biomolecules and biomotors. Importantly, the use of single-crystal rutile titanium dioxide nanocylinders is suggested for optical torque wrench, enabling...
doctoral thesis 2018
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Swiderek, Petra (author), Marbach, Hubertus (author), Hagen, C.W. (author)
contribution to periodical 2018
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van Assenbergh, S.P. (author), Meinders, Erwin (author), Geraedts, Jo M.P. (author), Dodou, D. (author)
When designing a new nanostructure or microstructure, one can follow a processing-based manufacturing pathway, in which the structure properties are defined based on the processing capabilities of the fabrication method at hand. Alternatively, a performance-based pathway can be followed, where the envisioned performance is first defined, and...
review 2018
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Hari, S. (author)
Focussed Electron Beam Induced Processing is a high resolution direct-write nanopatterning technique. Its ability to fabricate sub-10 nm structures together with its versatility and ease of use, in that it is resist-free and implementable inside a Scanning Electron Microscope, make it attractive for a variety of applications in nanofabrication....
doctoral thesis 2017
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Zafarani, H. (author), Mathwig, Klaus (author), Sudhölter, Ernst J. R. (author), Rassaei, L. (author)
We report a strategy for the fabrication of a new type of electrochemical nanogap transducer. These nanogap devices are based on signal amplification by redox cycling. Using two steps of electron-beam lithography, vertical gold electrodes are fabricated side by side at a 70 nm distance encompassing a 20 attoliter open nanogap volume. We...
journal article 2017
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Taal, A.J. (author)
This thesis presents a novel nanophotonic Metal-Insulator-Metal (MIM) grating structure that diffracts incident light by filtering colour based on interference. The grating creates two independent self-images (Talbot patterns) for two almost arbitrarily tuneable wavelengths in the visible spectrum. Lens-less imaging is promising for its ability...
master thesis 2017
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Bolten, Jens (author), Arat, K.T. (author), Ünal, Nezih (author), Porschatis, Caroline (author), Wahlbrink, Thorsten (author), Lemme, Max C. (author)
In this paper key challenges posed on metrology by feature dimensions of 20nm and below are discussed. In detail, the need for software-based tools for SEM image acquisition and image analysis in environments where CD-SEMs are not available and/or not flexible enough to cover all inspection tasks is outlined. These environments include...
conference paper 2017
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Hol, F.J.H. (author), Rotem, Or (author), Jurkevitch, Edouard (author), Dekker, C. (author), Koster, D. (author)
Soil is a microenvironment with a fragmented (patchy) spatial structure in which many bacterial species interact. Here, we explore the interaction between the predatory bacterium Bdellovibrio bacteriovorus and its prey Escherichia coli in microfabricated landscapes. We ask how fragmentation influences the prey dynamics at the microscale and...
journal article 2016
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Scotuzzi, M. (author), Kamerbeek, M.J. (author), Goodyear, A. (author), Cooke, M. (author), Hagen, C.W. (author)
To demonstrate the possibility of using EBID masks for sub-10 nm pattern transfer into silicon, first experiments were carried out by using 20-40 nm EBID masks, that were etched by different chemistries. It is experimentally verified that recipes based on hydrogen bromide, chlorine and boron trichloride can selectively etch silicon when using 20...
conference paper 2015
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Scotuzzi, M. (author), Kamerbeek, M.J. (author), Goodyear, A. (author), Cooke, M. (author), Hagen, C.W. (author)
To demonstrate the possibility of using electron beam-induced deposition (EBID) masks for sub-10 nm pattern transfer into silicon, first experiments were carried out by using 20- to 40-nm EBID masks, which were etched by different chemistries. It is experimentally verified that recipes based on hydrogen bromide, chlorine, and boron trichloride...
journal article 2015
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Hari, S. (author), Hagen, C.W. (author), Verduin, T. (author), Kruit, P. (author)
In a first study to analyze the feasibility of electron beam-induced deposition (EBID) for creating certain patterns in advanced lithography, line patterns were fabricated on silicon wafers using EBID. The growth conditions were such that the growth rate is fully determined by the electron flux (the current limited growth regime). It is...
journal article 2014
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