Nanostructure and microstructure fabrication: From desired properties to suitable processes

When designing a new nanostructure or microstructure, one can follow a processing-based manufacturing pathway, in which the structure properties are defined based on the processing capabilities of the fabrication method at hand. Alternatively, a performance-based pathway can be followed, where the envisioned performance is first defined, and...

Ultrahigh throughput plasma processing of free standing silicon nanocrystals with lognormal size distribution

We demonstrate a method for synthesizing free standing silicon nanocrystals in an argon/silane gas mixture by using a remote expanding thermal plasma. Transmission electron microscopy and Raman spectroscopy measurements reveal that the distribution has a bimodal shape consisting of two distinct groups of small and large silicon nanocrystals with...

Tip-based chemical vapor deposition with a scanning nano-heater

In this preliminary effort, a moving nano-heater directs a chemical vapor deposition reaction (nano-CVD) demonstrating a tip-based nanofabrication (TBN) method. Localized nano-CVD of copper (Cu) and copper oxide (CuO) on a silicon (Si) and silicon oxide (SiO2) substrate from gasses, namely sublimated copper acetylacetonate (Cu(acac)2), argon (Ar...

Characterization of low temperature deposited atomic layer deposition TiO2 for MEMS applications

TiO2 is an interesting and promising material for micro-/nanoelectromechanical systems (MEMS/NEMS). For high performance and reliable MEMS/NEMS, optimization of the optical characteristics, mechanical stress, and especially surface smoothness of TiO2 is required. To overcome the roughness issue of the TiO2 films due to crystallization during...

Current-induced nanogap formation and graphitization in boron-doped diamond films

A high-current annealing technique is used to fabricate nanogaps and hybrid diamond/graphite structures in boron-doped nanocrystalline diamond films. Nanometer-sized gaps down to ?1?nm are produced using a feedback-controlled current annealing procedure. The nanogaps are characterized using scanning electron microscopy and electronic transport...

Oxidation kinetics of nanoscale copper films studied by terahertz transmission spectroscopy

Terahertz (THz) transmission spectroscopy is used to measure the oxidation kinetics of copper thin films evaporated on silicon substrates. The transmission of broadband THz pulses from 1 to 7 THz through the copper film is measured while it gets oxidized at an elevated temperature in ambient air. The change in the transmitted THz electric field...

Pulsed helium ion beam induced deposition: A means to high growth rates

The sub-nanometer beam of a helium ion microscope was used to study and optimize helium-ion beam induced deposition of PtC nanopillars with the (CH3)3Pt(CPCH3) precursor. The beam current, beam dwell time, precursor refresh time, and beam focus have been independently varied. Continuous beam exposure resulted in narrow but short pillars, while...

Deterministic nanoassembly of a coupled quantum emitter–photonic crystal cavity system

Controlling the interaction of a single quantum emitter with its environment is a key challenge in quantum optics. Here, we demonstrate deterministic coupling of single nitrogen-vacancy (NV) centers to high-quality photonic crystal cavities. We preselect single NV centers and position their 50-nm-sized host nanocrystals into the mode maximum of...

Room-temperature stability of Pt nanogaps formed by self-breaking

We present a method to make Pt nanometer-spaced electrodes that are free of metallic particles and stable at ambient conditions. The nanogaps are fabricated using feedback-controlled electromigration to form few-atom contacts. When performing this procedure at elevated temperatures (>420?K), the Pt contacts undergo self-breaking so that...

Nanofabrication of electrodes with sub-5 nm spacing for transport experiments on single molecules and metal clusters