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van Dijk, J.P.G. (author)
Temperature sensors are widely integrated in high performance systems, e.g. microprocessors. If the die temperature becomes too high, the processor must throttle its clock speed to prevent reliability problems. This application requires temperature sensors that can be integrated in the same advanced technologies as the microprocessor, and that...
master thesis 2016
Gaitas, A. (author)
This dissertation aims to advance the current state of cantilevers with integrated metal thermal and deflection sensing elements. Metallic sensing elements enable the use of alternative substrate materials (such as polymers), that tend to exhibit higher compliance properties and are more robust (less brittle) compared to Si or Si3N4 cantilevers....
doctoral thesis 2013