Ultra-Thin Uncooled Integrable-on-Chip Detector to Measure Wide Infrared Radiation Residue in Lithography Exposure and Metrology Inspection Tools

In modern nano-scale lithography, an essential role of the source, the illumination, and projection lenses is to deliver the precise amount of energy at a specific wavelength to the photoresist deposited on a wafer surface during exposure. Unfortunately, the source of the most advanced lithography processes may produce unwanted infrared...

Fabrication Technologies of 3-Dimesional Electrodes for a Heart-on-Chip Application

Organs-on-Chips (OoCs) are micro-engineered devices in which small samples of human-organ tissue are cultured on the substrate. A chip is designed in such a way that it can emulate the in-vivo physiological environment for disease modeling and drug screening. OoC technology can be incorporated into the drug development process from early drug...

Rapid Prototyping of Organ-on-a-Chip Devices Using Maskless Photolithography

Organ-on-a-chip (OoC) and microfluidic devices are conventionally produced using microfabrication procedures that require cleanrooms, silicon wafers, and photomasks. The prototyping stage often requires multiple iterations of design steps. A simplified prototyping process could therefore offer major advantages. Here, we describe a rapid and...

A ground structure based topology optimization method for thermofluid problems

In this thesis, a ground structure based thermofluid topology optimization (TO) method is presented which is applicable to problems with creeping flow. Fluid channels with creeping flow are found in a variety of engineering applications, primarily in the field of microfluidics. Current fluid channel TO is typically done with density-based TO and...

Optimization methods for 3D lithography process utilizing DMD-based maskless grayscale photolithography system

Digital Micromirror Device (DMD)-based grayscale lithography is a promising tool for three dimensional (3D) microstructuring of thick-film photoresist since it is a maskless process, provides possibility for the free-form of 3D microstructures, and therefore rapid and cost-effective microfabrication. However, process parameter determination...

Accelerating Computational Electromagnetic Diffraction Model on Programmable Graphics Processors

This thesis is done in the framework of wafer metrology to accelerate an electromagnetic diffraction model (EDM), which is used to measure the profile on a wafer, on programmable graphics processors (GPU). The main focus of this thesis is to investigate the suitability of EDM to GPU architectures. This study contributes with statistical data and...

X-ray investigation of buried SiGe islands for devices with strain-enhanced mobility

In this work self-organized SiGe islands are used as stressors for Si capping layers, which later act as carrier channels in field effect transistors. To be able to address individual islands and to obtain a sufficiently narrow distribution of their properties, the SiGe islands are grown by molecular beam epitaxy on prepatterned Si substrates,...

Photolithographic patterning of the charge-density-wave conductor Rb 0.30 MoO 3