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Rong, B. (author), Van der Drift, E. (author), Van der Heijden, R.W. (author), Salemink, H.W.M. (author)
We have developed a reliable process to fabricate high quality 2D air-hole and dielectric column InP photonic crystals with a high aspect ratio on a STS production tool using ICP N2+Cl2 plasma. The photonic crystals have a triangular lattice with lattice constant of 400 nm and air-hole and dielectric column radius of 120 nm. Large efforts have...
conference paper 2006