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- Mok, G. (author) master thesis 2015
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Van Veen, S. (author)Background The general objective of this research is to investigate the use of ferrofluids in planar bearings for precision stages. Ferrofluids are suspensions of magnetic nanoparticles in a base fluid. When in a magnetic field, these particles are attracted and the fluid is pressurized. The induced pressure can be used to carry a load. This...master thesis 2013
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Dunning, A.G. (author)This paper presents the first zero stiffness six degrees of freedom (DoF) compliant precision stage. To deal with problems like backlash, friction and lubrication for performing ultra-precise positioning in a vacuum environment, a novel compliant structure is proposed. All six degrees of freedom are statically balanced (i.e. near zero stiffness)...master thesis 2011