- document
-
Davidovikj, D. (author), Scheepers, P.H. (author), van der Zant, H.S.J. (author), Steeneken, P.G. (author)To realize nanomechanical graphene-based pressure sensors, it is beneficial to have a method to electrically readout the static displacement of a suspended graphene membrane. Capacitive readout, typical in micro-electromechanical systems, gets increasingly challenging as one starts shrinking the dimensions of these devices because the expected...journal article 2017