Searched for: subject:"resonant%5C%2Bsensors"
(1 - 1 of 1)
Kumar, L. (author)
This thesis details the design of a self-oscillating MEMS resonator as a pressure sensor. A bi-layer circular diaphragm with a single center perforation is used as a pressure sensitive membrane which measures the absolute pressure of the surrounding medium. A novel aspect of the proposed sensor is that the resonator is made to oscillate by an...
master thesis 2014