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Challenges for scanning electron microscopy and inspection on the nanometer scale for non-IC application: And how to tackle them using computational techniques

Bolten, Jens (author), Arat, K.T. (author), Ünal, Nezih (author), Porschatis, Caroline (author), Wahlbrink, Thorsten (author), Lemme, Max C. (author)

In this paper key challenges posed on metrology by feature dimensions of 20nm and below are discussed. In detail, the need for software-based tools for SEM image acquisition and image analysis in environments where CD-SEMs are not available and/or not flexible enough to cover all inspection tasks is outlined. These environments include...

conference paper 2017

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Understanding the influence of 3D sidewall roughness on observed line-edge roughness in scanning electron microscopy images

van Kessel, L.C.P.M. (author), Huisman, T. (author), Hagen, C.W. (author)

Line-edge roughness (LER) is often measured from top-down critical dimension scanning electron microscope (CD-SEM) images. The true three-dimensional roughness profile of the sidewall is typically ignored in such analyses. We study the response of a CD-SEM to sidewall roughness (SWR) by simulation. We generate random rough lines and spaces,...

conference paper 2020

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Surface effects in simulations of scanning electron microscopy images

van Kessel, L.C.P.M. (author), Hagen, C.W. (author), Kruit, P. (author)

We have investigated the contributions of surface effects to Monte Carlo simulations of top-down scanning electron microscopy (SEM) images. The elastic and inelastic scattering mechanisms in typical simulations assume that the electron is deep in the bulk of the material. In this work, we correct the inelastic model for surface effects. We...

conference paper 2019

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Cathodoluminescence Microscopy of Nanostructures on Transparent Substrates

Narváez, A.C. (author)

Cathodoluminescence (CL), the excitation of light by an electron beam, has gained attention as an analysis tool for investigating the optical response of a structure, at a resolution that approaches that in electron microscopy, in the nanometer range. However, the application possibilities are limited because the use of transparent substrates,...

doctoral thesis 2014

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Silicon Technology for Integrating High-Performance Low-Energy Electron Photodiode Detectors

Sakic, A. (author)

doctoral thesis 2012

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A mesoscopic approach to the study of thin protective coatings by Positron Beam Analysis and Scanning Electron Microscopy

Escobar Galindo, R. (author)

The study of thin protective coatings is one of the major research topics in the industry. Among the many questions in this wide topic, the aim of this thesis has been to contribute to the understanding of two of them: the problem of the adhesion and the role of porosity in thin films. The thin films studied in this work were mainly...

doctoral thesis 2003

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Hydrogen mediated transport of Sn to Ru film surface

Faradzhev, N. (author), Sidorkin, V. (author)

The authors report on the interaction of atomic hydrogen with Sn and thin Ru film at room temperature. The study is done using a combination of photoelectron and low energy ion scattering spectroscopies as well as scanning electron microscopy. The adsorption of hydrogen on a Sn surface leads to the formation of stannane (SnH4), which...

journal article 2009

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Investigation of Corrosion and Cathodic Protection in Reinforced Concrete. II: Properties of Steel Surface Layers

Koleva, D.A. (author), De Wit, J.H.W. (author), Van Breugel, K. (author), Lodhi, Z.F. (author), Ye, G. (author)

The present study explores the formation of corrosion products on the steel surface (using as-received low carbon construction steel) in reinforced concrete in conditions of corrosion and subsequent transformation of these layers in conditions of cathodic protection (CP).

journal article 2007

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Position-controlled [100] InP nanowire arrays

Wang, J. (author), Plissard, S. (author), Hocevar, M. (author), Vu, T.T.T. (author), Zehender, T. (author), Immink, G.G.W. (author), Verheijen, M.A. (author), Haverkort, J. (author), Bakkers, E.P.A.M. (author)

We investigate the growth of vertically standing [100] zincblende InP nanowire (NW) arrays on InP (100) substrates in the vapor-liquid-solid growth mode using low-pressure metal-organic vapor-phase epitaxy. Precise positioning of these NWs is demonstrated by electron beam lithography. The vertical NW yield can be controlled by different...

journal article 2012

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Photolithographic patterning of the charge-density-wave conductor Rb 0.30 MoO 3

Van der Zant, H.S.J. (author), Mantel, O.C. (author), Heij, C.P. (author), Dekker, C. (author)

journal article 1997

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Orientation of the charge-density-wave chains in thin films of Rb 0.30 MoO 3

Mantel, O.C. (author), Van der Zant, H.S.J. (author), Steinfort, A.J. (author), Traeholt, C. (author), Dekker, C. (author)

journal article 1997

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Ultrasmall silicon quantum dots

Zwanenburg, F.A. (author), Van Loon, A.A. (author), Steele, G.A. (author), Rijmenam, C.E.W.M. (author), Balder, T. (author), Fang, Y. (author), Lieber, C.M. (author), Kouwenhoven, L.P. (author)

We report the realization of extremely small single quantum dots in p-type silicon nanowires, defined by Schottky tunnel barriers with Ni and NiSi contacts. Despite their ultrasmall size the NiSi–Si–NiSi nanowire quantum dots readily allow spectroscopy of at least ten consecutive holes, and additionally they display a pronounced excited-state...

journal article 2009

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Influence of hydrogen silsesquioxane resist exposure temperature on ultrahigh resolution electron beam lithography

Sidorkin, V. (author), Van der Drift, E.W.J.M. (author), Salemink, H. (author)

Performance of hydrogen silsesquioxane (HSQ) resist material with respect to the temperature during electron beam exposure was investigated. Electron beam exposure at elevated temperatures up to 90?°C shows sensitivity rise and slight contrast (?) degradation compared to lower temperature cases. Ultrahigh resolution structures formed at elevated...

journal article 2008

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Investigation of Corrosion and Cathodic Protection in Reinforced Concrete. I: Application of Electrochemical Techniques

Koleva, D.A. (author), De Wit, J.H.W. (author), Van Breugel, K. (author), Lodhi, Z.F. (author), Van Westing, E. (author)

The electrochemical behavior of steel reinforcement in conditions of corrosion and cathodic protection was studied, using electrochemical impedance spectroscopy (EIS) and compared to reference (noncorroding) conditions. Polarization resistance (PR) method and potentiodynamic polarization (PDP) were employed as well, in addition to ac 2 pin...

journal article 2007

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A high efficiency superconducting nanowire single electron detector

Rosticher, M. (author), Ladan, F.R. (author), Maneval, J.P. (author), Dorenbos, S.N. (author), Zijlstra, T. (author), Klapwijk, T.M. (author), Zwiller, V. (author), Lupa?cu, A. (author), Nogues, G. (author)

We report the detection of single electrons using a Nb0.7Ti0.3N superconducting wire deposited on an oxidized silicon substrate. While it is known that this device is sensitive to single photons, we show that it also detects single electrons with kilo-electron-volt energy emitted from the cathode of a scanning electron microscope with an...

journal article 2010

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Positioning Pd catalyst particles for carbon nanotube growth using charge patterns created with a scanning electron microscope

Zonnevylle, A.C. (author), Hagen, C.W. (author), Kruit, P. (author), Valenti, M. (author), Schmidt-Ott, A. (author)

Positioning of charged nanoparticles with the help of charge patterns in an insulator substrate is a known method. However, the creation of charge patterns with a scanning electron microscope for this is relatively new. Here a scanning electron microscope is used for the creation of localized charge patterns in an insulator, while a glowing wire...

journal article 2009

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Parallel electron-beam-induced deposition using a multi-beam scanning electron microscope

Post, P.C. (author), Mohammadi-Gheidari, A. (author), Hagen, C.W. (author), Kruit, P. (author)

Lithography techniques based on electron-beam-induced processes are inherently slow compared to light lithography techniques. The authors demonstrate here that the throughput can be enhanced by a factor of 196 by using a scanning electron microscope equipped with a multibeam electron source. Using electron-beam induced deposition with MeCpPtMe3...

journal article 2011

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High-resistivity nanogranular Co–Al–O films for high-frequency applications

Khalili Amiri, P. (author), Zhuang, Y. (author), Schellevis, H. (author), Rejaei, B. (author), Vroubel, M. (author), Ma, Y. (author), Burghartz, J.N. (author)

This work presents a series of high-resistivity nanogranular Co–Al–O films with maximum resistivity of ? 110?m??cm. The films were deposited using pulsed dc reactive sputtering of a Co72Al28 target in an oxygen/argon ambient. The samples were characterized by scanning electron microscopy (SEM), M-H loop measurements, and s-parameter measurements...

journal article 2007

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Electron postgrowth irradiation of platinum-containing nanostructures grown by electron-beam-induced deposition from Pt(PF3)4

Botman, A. (author), Hagen, C.W. (author), Li, J. (author), Thiel, B.L. (author), Dunn, K.A. (author), Mulders, J.J.L. (author), Randolph, S. (author), Toth, M. (author)

The material grown in a scanning electron microscope by electron beam-induced deposition (EBID) using Pt(PF3)4 precursor is shown to be electron beam sensitive. The effects of deposition time and postgrowth electron irradiation on the microstructure and resistivity of the deposits were assessed by transmission electron microscopy, selected area...

journal article 2009

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Corrosion Performance of Carbon Steel in Simulated Pore Solution in the Presence of Micelles

Hu, J. (author), Koleva, D.A. (author), De Wit, J.H.W. (author), Kolev, H. (author), Van Breugel, K. (author)

This study presents the results on the investigation of the corrosion behavior of carbon steel in model alkaline medium in the presence of very low concentration of polymeric nanoaggregates [0.0024 wt % polyethylene oxide (PEO)113-b-PS70 micelles]. The steel electrodes were investigated in chloride free and chloride-containing cement extracts....

journal article 2011