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Koelling, Sebastian (author), Stehouwer, L.E.A. (author), Paquelet Wuetz, B. (author), Scappucci, G. (author), Moutanabbir, Oussama (author)
Atom probes generate three-dimensional atomic-scale tomographies of material volumes corresponding to the size of modern-day solid-state devices. Here, the capabilities of atom probe tomography are evaluated to analyze buried interfaces in semiconductor heterostructures relevant for electronic and quantum devices. Employing brute-force search...
journal article 2022