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Babaei Gavan, K. (author), Westra, H.J.R. (author), Van der Drift, E.W.J.M. (author), Venstra, W.J. (author), Van der Zant, H.S.J. (author)
The effective Young’s modulus of silicon nitride cantilevers is determined for thicknesses in the range of 20–684 nm by measuring resonance frequencies from thermal noise spectra. A significant deviation from the bulk value is observed for cantilevers thinner than 150 nm. To explain the observations we have compared the thickness dependence of...
journal article 2009