Searched for: subject:"silicon%5C+dioxide"
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Sweers, Korné (author)
Thermal oxidation in silicon microelectromechanical systems (MEMS) induces stress in the oxide film and silicon. Such residual stresses are usually unwanted, as it can influence performance or damage components. It can also cause unwanted plastic deformation in silicon, as was observed in previous research. Currentmeasurement methods inMEMSare...
master thesis 2018
Shi, Shengtai (author)
This thesis study investigates the effects of differently prepared oxide substrates on gas sensing behaviors of graphene gas sensor. Explanations for why such effects happen are also revealed through experimental works. The thesis consists of a detailed study of gas sensing behaviors from graphene gas sensors using different oxide substrates....
master thesis 2017