Effects of Silicon Oxides as Substrates for Graphene Gas Sensor

This thesis study investigates the effects of differently prepared oxide substrates on gas sensing behaviors of graphene gas sensor. Explanations for why such effects happen are also revealed through experimental works. The thesis consists of a detailed study of gas sensing behaviors from graphene gas sensors using different oxide substrates....

Measuring atto-grams of buoyant mass using silicon dioxide suspended microchannel resonators

In connection with growing in applications of nanoparticles in various industrial sectors such as cosmetics and pharmaceuticals, the demand for in-line identification and characterization of nanoparticles suspended in fluids has increased. In addition to that, nanoparticles in general and nanoplastics in particular, can easily contaminate air...

Measuring plastic deformation of silicon as a result of thermal oxidation

Thermal oxidation in silicon microelectromechanical systems (MEMS) induces stress in the oxide film and silicon. Such residual stresses are usually unwanted, as it can influence performance or damage components. It can also cause unwanted plastic deformation in silicon, as was observed in previous research. Currentmeasurement methods inMEMSare...