Searched for: subject:"silicon%5C+micromachining"
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document
Pham, P.N. (author)
doctoral thesis 2003
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Foerster, J.A. (author)
doctoral thesis 1996
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Li, S.J. (author), Shen, C. (author), Sarro, P.M. (author)
This paper presents a silicon micromachined filter for micro- and nanoparticles. The filter is vertical and completely buried beneath the surface. The buried aspect allows additional features to be integrated above the filter, while the vertical aspect allows the creation of highly uniform pores and efficient use of die area. The filter is...
journal article 2011