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Nanochannel fabrication technique for fluidic applications

Conference paper (2003) - VG Kutchoukov, L.S. Pakula, Y. Garini, J.R. Mollinger, A. Bossche

Polyimide sacrificial layer for an all-dray post-process surface micromachining module

Conference paper (2003) - HTM Pham, A Bagolini, C.R. de Boer, J.M.W. Laros, L.S. Pakula, P.J. French, Pasqualina M Sarro

Polymide sacrificial layer for an all-dry post-process surface micromachining module

Conference paper (2003) - HTM Pham, A Bagolini, C.R. de Boer, J.M.W. Laros, L.S. Pakula, P.J. French, Pasqualina M Sarro

Fabrication technology for twin nanochannels

Conference paper (2003) - VG Kutchoukov, L.S. Pakula, J.R. Mollinger, A. Bossche

Fabrication of a CMOS compatible vertical accelerometer

Conference paper (2003) - L.S. Pakula, H Yang, HTM Pham, Pasqualina M Sarro, P.J. French

A surface micromachined accelerometer working in the pull-in operation mode

Conference paper (2002) - H Yang, L.S. Pakula, P.J. French

Polyimide sacrificial layer and novel materials for post-processing surface micromachining

Journal article (2002) - A Bagolini, L.S. Pakula, T.L.M. Scholtes, HTM Pham, P.J. French, Pasqualina M Sarro

Pressure sensor for harsh environments

Conference paper (2002) - L.S. Pakula, H Yang, HTM Pham, P.J. French, Pasqualina M Sarro

In-situ doped PECVD SiC for surface micromachined devices

Conference paper (2002) - C.R. de Boer, L.S. Pakula, Pasqualina M Sarro, HTM Pham

Pressure sensor for automotive applications

Conference paper (2002) - L.S. Pakula, H Yang, HTM Pham, P.J. French, Pasqualina M Sarro

Influence of deposition parameters and temperature on stress and strain of In Situ doped PECVD silicon carbide

Conference paper (2002) - HTM Pham, C.R. de Boer, L.S. Pakula, Pasqualina M Sarro

Single step cryogenic SF6/O2 plasma etching process for the development of inertial devices

Conference paper (2002) - G Craciun, H Yang, H.W. van Zeijl, L.S. Pakula, MA Blauw, E.W.J.M. van der Drift, P.J. French

A novel operation mode for accelerometers

Conference paper (2002) - H Yang, L.S. Pakula, P.J. French

New post-processing modules

Conference paper (2001) - L.S. Pakula, HMT Pham, C.R. de Boer, Pasqualina M Sarro, P.J. French

Dry etching release of structures in post-processing surface micromachining using polyimide as a sacrificial layer

Conference paper (2001) - A Bagolini, HMT Pham, T.L.M. Scholtes, L.S. Pakula, Pasqualina M Sarro

Coplanar waveguides and butt-joints on InP

Conference paper (2001) - JH den Besten, D Caprioli, MK Smit, L.S. Pakula, E Smalbrugge, T de Vries, JJM Kwaspen, AW Roodnat, R. van Dijk, F.E. van Vliet, XJM Leijtens

Novel material for low temperature post-processing micromachining

Conference paper (2001) - L.S. Pakula, HMT Pham, Pasqualina M Sarro, P.J. French

Damping caused by the gas flow in the holes of perforated structures

Conference paper (2001) - H Yang, M Bao, L.S. Pakula, P.J. French

Effects of gas flow in holes on the squeeze film damping of perforated structures

Conference paper (2001) - H Yang, L.S. Pakula, M Bao, P.J. French

Polyimide sacrificial layer for postprocessing surface micromachining

Conference paper (2001) - A Bagolini, T.L.M. Scholtes, HMT Pham, L.S. Pakula, Pasqualina M Sarro

L.S. Pakula

Authored